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Experimental study of amorphous, micro- or polycrystal silicium surface reactivity by atomic and molecular jet.

Bisson, Régis (2004) Experimental study of amorphous, micro- or polycrystal silicium surface reactivity by atomic and molecular jet. PhD thesis PICM, EP - LPICM Laboratoire de Physique des Interfaces et Couches Minces, EP/X p.0.

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Alternative Locations: http://www.imprimerie.polytechnique.fr/Theses/Files/ Bisson.pdf


Item Type:PhD Thesis (PhD)
Date:September 2004
Ecole Doctorale:ED 447 ECOLE DOCTORALE DE L'ECOLE POLYTECHNIQUE
Discipline:PICM
Collection (Fonds):EP/X
Institution:EP/X
Department:EP - LPICM Laboratoire de Physique des Interfaces et Couches Minces
Subjects:3. Physics, Optics
ID Code:937
Deposited By:Nadine Garnier
Deposited On:16 December 2004

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