Levif, Pierre (2007) Multiple frequency excitation in capacitive discharges used for etching in microelectronic. PhD thesis LPTP, LPTP, EP/X p.0.
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Alternative Locations: http://www.imprimerie.polytechnique.fr/Theses/Files/Levif.pdf
| Item Type: | PhD Thesis (PhD) |
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| Thesis Supervisor: | Chabert, Pascal |
| Date: | 08 November 2007 |
| Ecole Doctorale: | ED 447 ECOLE DOCTORALE DE L'ECOLE POLYTECHNIQUE |
| Discipline: | LPTP |
| Collection (Fonds): | EP/X |
| Institution: | EP/X |
| Department: | LPTP |
| Subjects: | 3. Physics, Optics |
| ID Code: | 3567 |
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| Deposited By: | Laurence Vidament |
| Deposited On: | 25 March 2008 |
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