Dao, Thien HAI (2007) Deposition of thin film of silicon at high deposition rate by MDECR plasma. PhD thesis PICM, PICM, EP/X p.0.
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Alternative Locations: http://www.imprimerie.polytechnique.fr/Theses/Files/Dao.pdf
| Item Type: | PhD Thesis (PhD) |
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| Thesis Supervisor: | Drevillon, Bernard |
| Date: | 25 May 2007 |
| Ecole Doctorale: | ED 447 ECOLE DOCTORALE DE L'ECOLE POLYTECHNIQUE |
| Discipline: | PICM |
| Collection (Fonds): | EP/X |
| Institution: | EP/X |
| Department: | PICM |
| Subjects: | 3. Physics, Optics |
| ID Code: | 3255 |
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| Deposited By: | Laurence Vidament |
| Deposited On: | 09 January 2008 |
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